nanoplus Nanosystems and Technologies GmbH
NP is an SME which was founded 1998 as spin off from Würzburg University. The company focuses on the development of customer specific optoelectronic devices for sensor applications. The company with currently 65 employees, has two clean room facilities with 250 m2(Gerbrunn, Germany) and 650 m2 (Meiningen, Germany), respectively. A complete process line for semiconductor laser fabrication is available, comprising mask aligners for optical lithography as well as systems for electron beam lithography, different dry etch systems, sputter systems, evaporators, laser mounting facilities, etc. A key product of NP are complex coupled distributed feedback (DFB) laser diodes. In these lasers complex coupling is obtained by combining a ridge waveguide with metal gratings on top of the waveguide layer on both sides of the laser ridge. DFB lasers realized by this technique in the InGaAs/AlGaAs material system have a high single mode yield (>90%), high sidemode suppression ratio (>40dB) combined with low back reflection sensitivity and thresholds and efficiencies, which correspond to those of Fabry Perot lasers realized from the same layers. NP manufactures and sells DFB and Fabry-Perot laser diodes in the wavelength range from 0.7 up to 3.0 µm for sensing and spectroscopic applications. As base material for the lasers GaAlAs/InGaAs, InGaAsP, GaInAsN and GaInAsSbheterostructures are used. In addition, NP offers interband cascade laser (ICL) DFBs from 3-6 µm and quantum cascade laser (QCL) DFBs at certain wavelengths between 7 and 14 µm for specific applications. Previous work within national and international cooperations has allowed NP to acquire significant experience in long wavelength device processing based on Quantum Cascade as well as Interband Cascade material. nanoplus has e.g. coordinated in the European research project SENSHY (www.senshy.eu) for the development of GaSb based devices in the 3.0 – 3.6 µm wavelength range for which the company was awarded the Prism Award for Green Photonics and Sustainable Energy in 2012.